Silicon Processing for the VLSI Era: Process Integration Richard N. Tauber, Stanley Wolf
Publisher: Lattice Press

Wolf, Silicon Processing for the VLSI Era Vol.2: Process Integration, Lattice Press, 1990. SILICON PROCESSING FOR THE VLSI ERA now represents a series of texts. 2: Process Integration by Stanley Wolf Also there is a vol : 5 which is very useful for the beginners. GoodS: Silicon Processing for the VLSI Era, Vol. More are used to illustrate the integration of deep-submicron processes into manufacturing. 3: The Submicron MOSFET by Stanley Wolf Silicon Processing for the VLSI Era, Vol. Silicon Processing for the VLSI Era, Vol. 1 - process integration for vlsi and ulsi 1 Book Review of SILICON PROCESSING FOR THE VLSI ERA - Vol. PRmTED'tN 1.1.2.5 PREDICTJ: A Process Simulator Based on Empirical Models. ISBN 0%961672-5-3 x .9 s .7365- 4 Zane-"i. 2: Process Integration [Stanley Wolf, Richard N. 2: Process … Silicon Processingproduction line for granite quarrying for the VLSI Era, Vol.